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Compact Flow Sensor Rapiflow FSM Series (FSM-V-NH3-R1000-HL4)

Compact Flow Sensor Rapiflow FSM Series FSM-V-NH3-R1000-HL4

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  • FSM-V-AH3-R0005-H2
  • FSM-X-AF005
  • Volume Discount

CKD

CKD

[Features]
· Platinum sensor chip utilizing silicone micromachining
· Achieves unprecedented compact size and high-speed response through a newly proposed rectifying mechanism
· Can be mounted at the tip of the movable part closest to the measurement section, making it suitable for applications such as electronic component adsorption confirmation and leak testing as a thermal flow sensor, Rapiflow

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Part Number

Configured Part Number is shown.

FSM-V-NH3-R1000-HL4

Drawing

FSM-X Series

· Sensor head single item

Compact flow sensor Rapiflow FSM series external shape diagram 1

· With flow path block

Compact flow sensor Rapiflow FSM series External Shape Diagram 2

· With ⌀4 quick connect fitting

Compact flow sensor Rapiflow FSM series External Shape Diagram 3

· With M5

· Option cable

Compact flow sensor Rapiflow FSM series External Shape Diagram 4
 

FSM-V Series (Common to analog output type and switch output type)

· FSM-V-*V3-R*-H2
(Lead L-shaped type, straight type ⌀1.8 Air Fiber)
· FSM-V-*H3-R*-H2
(Lead straight type, straight type ⌀1.8 Air Fiber)
Compact flow sensor Rapiflow FSM series External Shape Diagram 5
Compact flow sensor Rapiflow FSM series External Shape Diagram 6
· FSM-V-*V3-R*-H4
(Lead L-shaped type, straight type ⌀4 one-touch)
· FSM-V-*H3-R*-H4
(lead straight type, straight type ⌀4 one-touch)
Compact flow sensor Rapiflow FSM series External Shape Diagram 7
Compact flow sensor Rapiflow FSM series External Shape Diagram 8
· FSM-V-*V3-R*-HL4
(lead L-shaped type, L-shaped type ⌀4 one-touch)
· FSM-V-*H3-R*-HL4
(Lead straight type, L-shaped ⌀4 one-touch)
Compact flow sensor Rapiflow FSM series External Shape Diagram 9
Compact flow sensor Rapiflow FSM series External Shape Diagram 10
· FSM-V-*V3-R*-M5
(Lead L type, port diameter M5)
· FSM-V-*H3-R*-M5
(Lead straight type, port diameter M5)
Compact flow sensor Rapiflow FSM series External Shape Diagram 11
Compact flow sensor Rapiflow FSM series External Shape Diagram 12

*The external appearance of the front seat differs between the analog output type and the switch output type.

Product Specification

FSM-X Series Specifications

Part numberAnalog output type
ItemsFSM-X-AR005FSM-X-AR010FSM-X-AR050FSM-X-AR100FSM-X-AF005FSM-X-AF010FSM-X-AF050FSM-X-AF100
Flow rate range (L/min) (Note 1)-0.5 to +0.5-1 to +1-5 to +5-10 to +100 to +0.50 to +10 to +50 to +10
Usage conditionsCompatible fluid (Note 2)Clean air (JIS B 8392-1:2012 (ISO 8573-1:2010) 1.1.1 to 1.6.2), nitrogen
Maximum operating pressure (MPa)0.2
Minimum operating pressure (MPa)-0.09
Pressure Resistance (MPa)0.3
Ambient temperature / humidity (°C)0 to +50°C, 80% RH or less
Operating fluid temperature (°C)0 to +50 (no condensation)
Storage ambient temperature (°C)-20 to +60 (no condensation)
Output1 analog output (1-5 V voltage output, load impedance 50 kΩ or more) Note 3
Accuracy (*4)LinearityNonlinear characteristics
Pressure characteristicsBidirectional type: +/-5% F.S. or less (-0.09 to +0.2 MPa, based on 0.1 MPa) Unidirectional type: +/-10% F.S. or less (-0.09 to +0.2 MPa, based on 0.1 MPa)
Temperature characteristicsBidirectional type: +/-0.3% F.S./°C or less (0 to +50°C, 25°C reference) Unidirectional type: +/-0.6% F.S./°C or less (0 to +50°C, 25°C reference)
Repeatability (repeatability)
(Note 5)		+/- 2% F.S. or less
Response time (Note 6)5 ms or less (8 ms or less at 10 L/min)
External leakage (Note 7)1 mL/min or less (sensor head single item), 2 mL/min (with flow path block)
Current consumption (Note 8)30 mA or less
Power supply voltage24 V DC (21.6 to 26.4 V DC), ripple 1% or less
Power supply voltage fluctuation+/-2% F.S. or less (21.6 to 26.4 V)
Lead⌀2.9 mm 3-core (⌀0.38 mm insulator outer diameter ⌀0.8 mm)
ConnectorProduct sideSM03B-SRSS-TB (by JST), no locking mechanism
Compatible
Connector		HousingSHR-03 V-S (manufactured by JST)
Connector pinSSH-003T-P0.2-H (manufactured by JST)
MountingMounting postureVertical / Horizontal Mounting
Straight pipe at inletN/A
Vibration resistance10 to 150 Hz, 1.5 mm double amplitude, maximum 10 G, 2 hours in each of X, Y, and Z directions
EMC DirectiveEN61000-6-4, EN61000-6-2
Weight (g)No SymbolApprox. 4 (cable not included)
H04Approx. 17 (cable not included)
M05Approx. 17 (cable not included)
  • Note 1: The flow rate is converted to the volumetric flow rate at 20°C and 1 atmosphere (101 kPa).
  • Note 2: Please use air that does not contain corrosive components such as chlorine, sulfur, or acids. When using compressed air, please use clean air of class 1.1.1 to 1.6.2 according to JIS B 8392-1:2012 (ISO 8573-1:2010).
    Compressed air from the compressor contains condensate (water, oxidized oil, contaminants, etc.). To maintain the functionality of this product, please install a filter, air dryer, and oil mist filter on the inlet (upstream) side of this product before use.
    When using this product for adsorption verification, be sure to install an air filter between the adsorption nozzle and this product to prevent the intake of contaminants.
Compact flow sensor Rapiflow FSM series product specification related image 1
  • Note 3: The flow rate output of this product does not indicate the absolute value of the flow rate.
    *About Connections Load
    The output impedance of the analog output section is 1kΩ. If the impedance of the connected load is low, the error in the output value will increase. Please check the error due to the impedance of the connected load before use.
    ■ Sample calculation
    · Output impedance of FSM-X: Ro = 1kΩ
    · Internal impedance of the load: Rx = 1MΩ
    · Output value = (1 - Ro / (Ro + Rx)) x 100% = (1 - (1kΩ / (1kΩ + 1MΩ))) x 100%
    ⇒ Error in output value = approximately 0.1%
    *About wiring resistance
    The voltage of this product is measured at the connector section. When using the option cable (FSM-X-C33), please note that the voltage may change due to the cable's wiring resistance (0.23Ω/m or less).
    ■ Sample calculation
    · Wiring resistance of option cable (FSM-X-C33) (3 m): 0.23Ω/m x 3 m = 0.69Ω
    · Voltage generated on the power line = product current consumption (= 30 mA) x wiring resistance 0.69Ω = approx. 0.02 V
    · Output value error = 0.02 V / 4 V (full scale) = 0.5% F.S.
  • 　　
    Accuracy conditions: Temperature 25+/-3°C, supply voltage DC24+/-0.01 V
    F.S. is defined as an analog output of 1 to 5 V.
  • Note 5: When the flow rate is ON, the average value of data collected over 20 seconds at a 0.5 ms sampling interval is considered as one measurement, and the repeatability is based on 10 consecutive ON-OFF cycles of the flow rate. Changes over time are not included.
  • Note 6: This is the time required for the output to reach 80% of the full-scale flow rate after flow rate detection. The response time varies depending on the piping conditions.
  • Note 7: This value is measured under an internal pressure of 0.2 MPa in an environment of 25°C +/- 3°C. This is the initial value and does not include changes over time.
  • Note 8: This is the current when connected to 24 V DC with no load connected. Please note that the current consumption may vary depending on the load connection status and other factors.
 
Pin No.Line ColorType of Signal
1BrownPower supply +24 V DC
2BluePower - GND
3BlackAnalog output (1 to 5 V)
 

FSM-V Series sensor main body specifications

Part numberAnalog output typeSwitch output type
ItemsFSM-V-A-R0005FSM-V-A-R0010FSM-V-A-R0050FSM-V-A-R0100FSM-V-A-R0500FSM-V-A-R1000FSM-V-N/P-R0005FSM-V-N/P-R0010FSM-V-N/P-R0050FSM-V-N/P-R0100FSM-V-N/P-R0500FSM-V-N/P-R1000
Flow rate range
(L/min) (Note 7)		-0.05 to +0.05-0.1 to +0.1-0.5 to +0.5-1 to +1-5 to +5-10 to +10-0.05 to +0.05-0.1 to +0.1-0.5 to +0.5-1 to +1-5 to +5-10 to +10
(Reference) Compatible nozzles for adsorption and desorption use⌀0.1 nozzle⌀0.2
Nozzle		⌀0.3
Nozzle		Collet nozzle⌀0.1 nozzle⌀0.2
Nozzle		⌀0.3
Nozzle		Collet nozzle
Usage
conditions		Compatible
Fluid		Clean air (JIS B 8392-1:2012 (ISO 8573-1:2010) 1.1.1 to 5.6.2), compressed air (JIS B 8392-1:2012 (ISO 8573-1:2010) 1.1.1 to 1.6.2) (Note 1), nitrogen gas
Maximum operating pressure
(MPa)		0.2
Maximum operating pressure
(MPa)		-0.09
Pressure resistance
(MPa)		0.3
Ambient temperature/humidity
(℃)		0 to +50, 90% RH or less (no condensation)
Operating fluid temperature
(℃)		0 to +50
DisplayPower display (green)Power display (green), switch output display (yellow)
Output1-point analog output (*2)
(1–5 V voltage output, load impedance 50 kΩ or more)		2-point switch output (*3)
(NPN or PNP open collector output, 30 V DC or less, 50 mA or less, compatible with PLC and relays)
Accuracy
(*4)		LinearityWithin +/-5% F.S. (0.1 MPa, flow rate range +/-100% F.S.)-
Pressure
Properties		+/-5% F.S. or less (-0.09 to +0.2 MPa, based on 0.1 MPa)-
Temperature
Properties		+/-0.2% F.S./°C or less (15 to 35°C, 25°C reference)-
Repeatability
(repeatability accuracy)		+/- 1% F.S. or less+/- 2% F.S. or less+/- 2% F.S. or less
Response time5 ms or less (sensor only, when 90% of the final output voltage is reached) (Note 5)
Power supply voltageDC 12/24 V (10 to .826.4 V)
Current Consumption30 mA or less
Lead⌀2.6 3-core (0.15 mm2 insulator outer diameter ⌀0.81) 3 m⌀2.6 4-core (0.15 mm2 insulator outer diameter ⌀0.81) 3 m
MountingMounting
posture		Vertical / Horizontal Mounting
Introduction
Straight Pipe		N/A
Protective StructureIEC standard IP40
Vibration resistance10 to 150 Hz, 1.5 mm double amplitude, maximum 10 G, 2 hours in each of X, Y, and Z directions
EMC DirectiveEN55011, EN61000-6-2, EN61000-4-2/3/4/6/8
Weight (g)Approx. 8 (excluding lead and fitting)
  • Note 1: Please use air that does not contain corrosive components such as chlorine, sulfur, or acids.
    When using compressed air, please use clean air of class 1.1.1 to 1.6.2 as specified in JIS B 8392-1:2012 (ISO 8573-1:2010).
    Compressed air from the compressor contains condensate (water, oxidized oil, contaminants, etc.). To maintain the functionality of this product, please install a filter,
    air dryer, and oil mist filter on the inlet (upstream) side of this product.
    When using this product for adsorption confirmation, be sure to install an air filter between the adsorption nozzle and this product to prevent the intake of contaminants.
Compact flow sensor Rapiflow FSM series product specification related image 2
  • Note 2: The analog output indicates 3 V when the flow rate is 0. When the lead is on the right side and you view the main body with the fluid flowing to the right, the output shifts toward 5 V. In the case of reverse flow, the output shifts toward 1 V.
  • Note 3: The switch output uses a single threshold detection method with fixed hysteresis, and can be set across the entire flow rate range by turning the trimmer. Additionally, the operating modes of OUT1 and OUT2 are opposite.
  • 　　
    Accuracy conditions: Temperature 25+/-3°C, supply voltage DC24+/-0.01 V
    In this specification, F.S. (Full Scale) indicates the flow rate range. For example, if the flow rate range is -10 to +10 L/min, the F.S. is 20 L/min.
  • Note 5: The response time varies depending on the piping conditions.
  • Note 6: Please use clean, dry gas that does not contain corrosive components such as chlorine, sulfur, or acids, and is free of dust and oil.
    When using compressed air, please use clean air of class 1.1.1 to 1.6.2 according to JIS B 8392-1:2003. Compressed air from the compressor contains condensate (water, oxidized oil, contaminants, etc.).
    To maintain the function of this product, please install a filter, air dryer (min. pressure dew point 10°C or lower), and oil mist filter (maximum oil content 0.1 mg/m3) on the inlet (upstream) side of this product before use.
    When using this product for adsorption verification, be sure to install an air filter between the adsorption nozzle and this product to prevent the intake of contaminants.
  • Note 7: Converted to volumetric flow rate at 20°C and 1 atmosphere (101 kPa).

FSM-V Series Separate Display Specifications (Dedicated for Analog Output Type) (Note 8)

Part numberRemote Indicator
ItemsFSM-V-DN/P-R0005FSM-V-DN/P-R0010FSM-V-DN/P-R0050FSM-V-DN/P-R0100FSM-V-DN/P-R0500FSM-V-DN/P-R1000
Compatible analog output type part numbersFSM-V-A-R0005FSM-V-A-R0010FSM-V-A-R0050FSM-V-A-R0100FSM-V-A-R0500FSM-V-A-R1000
DisplayType of DisplayFlow rate display (3-digit 7-segment, orange), operation and switch output display (orange)
Minimum Display Unit (Note 9)0.1 mL/min (Note 7)1 mL/min (Note 7)0.01 L/min (Note 7)0.1 L/min (Note 7)
Output2-point switch output
(NPN or PNP open collector output, 30 V DC, 50 mA max, voltage drop 2.4 V, compatible with PLC and relays)
1-point analog output
(1–5 V voltage output, load impedance 50 kΩ or more)
Power supply voltageDC12/24 V (10.8 to 26.4 V)
Current Consumption50 mA or less (indicator only)
Lead⌀3.7, 5-core (0.2 mm2 insulator outer diameter ⌀1.0) 1 m
Available FunctionsFlow rate display, flow rate peak hold, switch output, analog output
Operating ambient temperature, humidity0 to +50°C, 85% RH or less (No condensation)
Protective StructureIEC standard IP40
EMC DirectiveEN55011, EN61000-6-2, EN61000-4-2/3/4/6/8
Weight (g)Approx. 70 (including 1 m lead)
  • Note 7: Converted to volumetric flow rate at 20°C and 1 atmosphere (101 kPa).
  • Note 8: The separate display unit is dedicated for analog output type. Please note that the switch output type cannot be connected.
  • Note 9: This indicates the minimum display unit of the flow rate and does not guarantee display accuracy.
30
45
60
  1. 1
Part Number
FSM-V-NH3-R1000-HL4
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipType Flow Rate Range (Max. Value)
(L/min) 		Output Method Analog Output Specification Pipe Port Type Plumbing Thread Type Plumbing Thread Nominal Pressure Type Number of Input Points Number of Output Points Analog Voltage Output
(V) 		Power Supply Voltage
(V) 		Connecting Tube Diameter Direct Connection Diameter Flow Direction Body Material Connection equipment Fitting type Cable Lead Wire Drawer Direction

MYR 1,194.25

1 Piece(s)Available 22 Day(s) or more Flow rate sensor[10 < 50] 10NPN Open Collector-One-Touch Couplings---12-12~244-BidirectionalResin-L-shaped ⌀4 one-touchWith lead (3 m)Straight type

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  1. 1
 

Basic Information

Fluid Type Air / Nitrogen Gas Sensor, Monitor Structure Separate Type, Connector Joint Pressure Resistant(MPa) 0.3
Flow Rate Type Small Flow Rate Operating Temperature Range(°C) 0::50 Power Supply Type DC

Please check the type/dimensions/specifications of the part FSM-V-NH3-R1000-HL4 in the Compact Flow Sensor Rapiflow FSM Series series.

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Specification/Dimensions

  • Analog Output Specification

  • Plumbing Thread Type

    • M

    Clear

  • Plumbing Thread Nominal

    • 5

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  • Pressure Type

  • Analog Voltage Output(V)

  • Connection equipment

    • 0.5
    • 1
    • 5
    • 10

    Clear

  • type

    • FSM-V
    • FSM-V-NH
    • FSM-V-NV
    • FSM-V-PH
    • FSM-X
    • FSM-X-AF
    • FSM-X-AR

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  • Type

    • Pressure Sensor Head
    • Flow rate sensor
    • Flow monitor

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  • Flow Rate Range (Max. Value)(L/min)

  • Output Method

    • NPN Open Collector
    • PNP Open Collector
    • Analog

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  • Pipe Port Type

    • Female Thread
    • One-Touch Couplings
    • Direct Attached

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  • Number of Input Points

  • Number of Output Points

  • Power Supply Voltage(V)

  • Connecting Tube Diameter

  • Flow Direction

  • Body Material

    • Resin

    Clear

  • Fitting type

    • Straight type ⌀1.8 Air Fiber
    • L-shaped ⌀4 one-touch
    • Straight type ⌀4 one-touch
    • With channel block (φ4mm one-touch fitting)
    • Port diameter M5
    • With channel block (M5)
    • Sensor head individual

    Clear

  • Cable

    • With lead (3 m)
    • With connector (3-core, 3m)
    • NA
    • Not Included

    Clear

  • Lead Wire Drawer Direction

    • L type
    • Straight type

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  • CAD

    • 2D
    • 3D

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Days to Ship

    • All
    • 11 Day(s) or Less
    • 14 Day(s) or Less
    • 22 Day(s) or Less
    • 57 Day(s) or Less

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FSM-V-NV3-R0005-HL4
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipType Flow Rate Range (Max. Value)
(L/min) 		Output Method Analog Output Specification Pipe Port Type Plumbing Thread Type Plumbing Thread Nominal Pressure Type Number of Input Points Number of Output Points Analog Voltage Output
(V) 		Power Supply Voltage
(V) 		Connecting Tube Diameter Direct Connection Diameter Flow Direction Body Material Connection equipment Fitting type Cable Lead Wire Drawer Direction

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1 Piece(s)Available 22 Day(s) or more Flow rate sensor[< 10] 1Analog-Direct Attached---11-12~24-1.8BidirectionalResin-Straight type ⌀1.8 Air FiberWith lead (3 m)Straight type

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MYR 1,114.66

1 Piece(s)Available 22 Day(s) or more Flow rate sensor[10 < 50] 10Analog-One-Touch Couplings---11-12~244-BidirectionalResin-L-shaped ⌀4 one-touchWith lead (3 m)Straight type

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1 Piece(s)Available 22 Day(s) or more Flow rate sensor[< 10] 0.05NPN Open Collector-Direct Attached---12-12~24-1.8BidirectionalResin-Straight type ⌀1.8 Air FiberWith lead (3 m)L type

MYR 1,194.25

1 Piece(s)Available 22 Day(s) or more Flow rate sensor[< 10] 0.05NPN Open Collector-One-Touch Couplings---12-12~244-BidirectionalResin-Straight type ⌀4 one-touchWith lead (3 m)L type

MYR 1,194.25

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