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Compact Flow Sensor Rapiflow FSM Series (FSM-V-NH3-R0005-HL4)

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Volume Discount

[Features]
· Platinum sensor chip utilizing silicone micromachining
· Achieves unprecedented compact size and high-speed response through a newly proposed rectifying mechanism
· Can be mounted at the tip of the movable part closest to the measurement section, making it suitable for applications such as electronic component adsorption confirmation and leak testing as a thermal flow sensor, Rapiflow

Part Number

Configured Part Number is shown.

FSM-V-NH3-R0005-HL4

Product Specifications
Part Numbers
Catalog

Drawing

FSM-X Series

· Sensor head single item

Compact flow sensor Rapiflow FSM series external shape diagram 1

· With flow path block

Compact flow sensor Rapiflow FSM series External Shape Diagram 2

· With ⌀4 quick connect fitting

Compact flow sensor Rapiflow FSM series External Shape Diagram 3

· With M5

· Option cable

Compact flow sensor Rapiflow FSM series External Shape Diagram 4

FSM-V Series (Common to analog output type and switch output type)

· FSM-V-*V3-R*-H2
(Lead L-shaped type, straight type ⌀1.8 Air Fiber)

· FSM-V-*H3-R*-H2
(Lead straight type, straight type ⌀1.8 Air Fiber)

Compact flow sensor Rapiflow FSM series External Shape Diagram 5

Compact flow sensor Rapiflow FSM series External Shape Diagram 6

· FSM-V-*V3-R*-H4
(Lead L-shaped type, straight type ⌀4 one-touch)

· FSM-V-*H3-R*-H4
(lead straight type, straight type ⌀4 one-touch)

Compact flow sensor Rapiflow FSM series External Shape Diagram 7

Compact flow sensor Rapiflow FSM series External Shape Diagram 8

· FSM-V-*V3-R*-HL4
(lead L-shaped type, L-shaped type ⌀4 one-touch)

· FSM-V-*H3-R*-HL4
(Lead straight type, L-shaped ⌀4 one-touch)

Compact flow sensor Rapiflow FSM series External Shape Diagram 9

Compact flow sensor Rapiflow FSM series External Shape Diagram 10

· FSM-V-*V3-R*-M5
(Lead L type, port diameter M5)

· FSM-V-*H3-R*-M5
(Lead straight type, port diameter M5)

Compact flow sensor Rapiflow FSM series External Shape Diagram 11

Compact flow sensor Rapiflow FSM series External Shape Diagram 12

*The external appearance of the front seat differs between the analog output type and the switch output type.

Product Specification

FSM-X Series Specifications

Part number		Analog output type
Items		FSM-X-AR005	FSM-X-AR010	FSM-X-AR050	FSM-X-AR100	FSM-X-AF005	FSM-X-AF010	FSM-X-AF050	FSM-X-AF100
Flow rate range (L/min) (Note 1)		-0.5 to +0.5	-1 to +1	-5 to +5	-10 to +10	0 to +0.5	0 to +1	0 to +5	0 to +10
Usage conditions	Compatible fluid (Note 2)	Clean air (JIS B 8392-1:2012 (ISO 8573-1:2010) 1.1.1 to 1.6.2), nitrogen
	Maximum operating pressure (MPa)	0.2
	Minimum operating pressure (MPa)	-0.09
	Pressure Resistance (MPa)	0.3
	Ambient temperature / humidity (°C)	0 to +50°C, 80% RH or less
	Operating fluid temperature (°C)	0 to +50 (no condensation)
Storage ambient temperature (°C)		-20 to +60 (no condensation)
Output		1 analog output (1-5 V voltage output, load impedance 50 kΩ or more) Note 3
Accuracy (*4)	Linearity	Nonlinear characteristics
	Pressure characteristics	Bidirectional type: +/-5% F.S. or less (-0.09 to +0.2 MPa, based on 0.1 MPa) Unidirectional type: +/-10% F.S. or less (-0.09 to +0.2 MPa, based on 0.1 MPa)
	Temperature characteristics	Bidirectional type: +/-0.3% F.S./°C or less (0 to +50°C, 25°C reference) Unidirectional type: +/-0.6% F.S./°C or less (0 to +50°C, 25°C reference)
	Repeatability (repeatability) (Note 5)	+/- 2% F.S. or less
Response time (Note 6)		5 ms or less (8 ms or less at 10 L/min)
External leakage (Note 7)		1 mL/min or less (sensor head single item), 2 mL/min (with flow path block)
Current consumption (Note 8)		30 mA or less
Power supply voltage		24 V DC (21.6 to 26.4 V DC), ripple 1% or less
Power supply voltage fluctuation		+/-2% F.S. or less (21.6 to 26.4 V)
Lead		⌀2.9 mm 3-core (⌀0.38 mm insulator outer diameter ⌀0.8 mm)
Connector	Product side	SM03B-SRSS-TB (by JST), no locking mechanism
Compatible Connector	Housing	SHR-03 V-S (manufactured by JST)
Compatible Connector	Connector pin	SSH-003T-P0.2-H (manufactured by JST)
Mounting	Mounting posture	Vertical / Horizontal Mounting
Mounting	Straight pipe at inlet	N/A
Vibration resistance		10 to 150 Hz, 1.5 mm double amplitude, maximum 10 G, 2 hours in each of X, Y, and Z directions
EMC Directive		EN61000-6-4, EN61000-6-2
Weight (g)	No Symbol	Approx. 4 (cable not included)
	H04	Approx. 17 (cable not included)
	M05	Approx. 17 (cable not included)

Note 1: The flow rate is converted to the volumetric flow rate at 20°C and 1 atmosphere (101 kPa).
Note 2: Please use air that does not contain corrosive components such as chlorine, sulfur, or acids. When using compressed air, please use clean air of class 1.1.1 to 1.6.2 according to JIS B 8392-1:2012 (ISO 8573-1:2010).
Compressed air from the compressor contains condensate (water, oxidized oil, contaminants, etc.). To maintain the functionality of this product, please install a filter, air dryer, and oil mist filter on the inlet (upstream) side of this product before use.
When using this product for adsorption verification, be sure to install an air filter between the adsorption nozzle and this product to prevent the intake of contaminants.

Compact flow sensor Rapiflow FSM series product specification related image 1

Note 3: The flow rate output of this product does not indicate the absolute value of the flow rate.
*About Connections Load
The output impedance of the analog output section is 1kΩ. If the impedance of the connected load is low, the error in the output value will increase. Please check the error due to the impedance of the connected load before use.
■ Sample calculation
· Output impedance of FSM-X: Ro = 1kΩ
· Internal impedance of the load: Rx = 1MΩ
· Output value = (1 - Ro / (Ro + Rx)) x 100% = (1 - (1kΩ / (1kΩ + 1MΩ))) x 100%
⇒ Error in output value = approximately 0.1%
*About wiring resistance
The voltage of this product is measured at the connector section. When using the option cable (FSM-X-C33), please note that the voltage may change due to the cable's wiring resistance (0.23Ω/m or less).
■ Sample calculation
· Wiring resistance of option cable (FSM-X-C33) (3 m): 0.23Ω/m x 3 m = 0.69Ω
· Voltage generated on the power line = product current consumption (= 30 mA) x wiring resistance 0.69Ω = approx. 0.02 V
· Output value error = 0.02 V / 4 V (full scale) = 0.5% F.S.
　　
Accuracy conditions: Temperature 25+/-3°C, supply voltage DC24+/-0.01 V
F.S. is defined as an analog output of 1 to 5 V.
Note 5: When the flow rate is ON, the average value of data collected over 20 seconds at a 0.5 ms sampling interval is considered as one measurement, and the repeatability is based on 10 consecutive ON-OFF cycles of the flow rate. Changes over time are not included.
Note 6: This is the time required for the output to reach 80% of the full-scale flow rate after flow rate detection. The response time varies depending on the piping conditions.
Note 7: This value is measured under an internal pressure of 0.2 MPa in an environment of 25°C +/- 3°C. This is the initial value and does not include changes over time.
Note 8: This is the current when connected to 24 V DC with no load connected. Please note that the current consumption may vary depending on the load connection status and other factors.

Pin No.	Line Color	Type of Signal
1	Brown	Power supply +24 V DC
2	Blue	Power - GND
3	Black	Analog output (1 to 5 V)

FSM-V Series sensor main body specifications

Part number		Analog output type						Switch output type
Items		FSM-V-A-R0005	FSM-V-A-R0010	FSM-V-A-R0050	FSM-V-A-R0100	FSM-V-A-R0500	FSM-V-A-R1000	FSM-V-N/P-R0005	FSM-V-N/P-R0010	FSM-V-N/P-R0050	FSM-V-N/P-R0100	FSM-V-N/P-R0500	FSM-V-N/P-R1000
Flow rate range (L/min) (Note 7)		-0.05 to +0.05	-0.1 to +0.1	-0.5 to +0.5	-1 to +1	-5 to +5	-10 to +10	-0.05 to +0.05	-0.1 to +0.1	-0.5 to +0.5	-1 to +1	-5 to +5	-10 to +10
(Reference) Compatible nozzles for adsorption and desorption use		⌀0.1 nozzle		⌀0.2 Nozzle	⌀0.3 Nozzle	Collet nozzle		⌀0.1 nozzle		⌀0.2 Nozzle	⌀0.3 Nozzle	Collet nozzle
Usage conditions	Compatible Fluid	Clean air (JIS B 8392-1:2012 (ISO 8573-1:2010) 1.1.1 to 5.6.2), compressed air (JIS B 8392-1:2012 (ISO 8573-1:2010) 1.1.1 to 1.6.2) (Note 1), nitrogen gas
	Maximum operating pressure (MPa)	0.2
	Maximum operating pressure (MPa)	-0.09
	Pressure resistance (MPa)	0.3
	Ambient temperature/humidity (℃)	0 to +50, 90% RH or less (no condensation)
	Operating fluid temperature (℃)	0 to +50
Display		Power display (green)						Power display (green), switch output display (yellow)
Output		1-point analog output (*2) (1–5 V voltage output, load impedance 50 kΩ or more)						2-point switch output (*3) (NPN or PNP open collector output, 30 V DC or less, 50 mA or less, compatible with PLC and relays)
Accuracy (*4)	Linearity	Within +/-5% F.S. (0.1 MPa, flow rate range +/-100% F.S.)						-
	Pressure Properties	+/-5% F.S. or less (-0.09 to +0.2 MPa, based on 0.1 MPa)						-
	Temperature Properties	+/-0.2% F.S./°C or less (15 to 35°C, 25°C reference)						-
	Repeatability (repeatability accuracy)	+/- 1% F.S. or less				+/- 2% F.S. or less		+/- 2% F.S. or less
Response time		5 ms or less (sensor only, when 90% of the final output voltage is reached) (Note 5)
Power supply voltage		DC 12/24 V (10 to .826.4 V)
Current Consumption		30 mA or less
Lead		⌀2.6 3-core (0.15 mm² insulator outer diameter ⌀0.81) 3 m						⌀2.6 4-core (0.15 mm² insulator outer diameter ⌀0.81) 3 m
Mounting	Mounting posture	Vertical / Horizontal Mounting
Mounting	Introduction Straight Pipe	N/A
Protective Structure		IEC standard IP40
Vibration resistance		10 to 150 Hz, 1.5 mm double amplitude, maximum 10 G, 2 hours in each of X, Y, and Z directions
EMC Directive		EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8
Weight (g)		Approx. 8 (excluding lead and fitting)

Note 1: Please use air that does not contain corrosive components such as chlorine, sulfur, or acids.
When using compressed air, please use clean air of class 1.1.1 to 1.6.2 as specified in JIS B 8392-1:2012 (ISO 8573-1:2010).
Compressed air from the compressor contains condensate (water, oxidized oil, contaminants, etc.). To maintain the functionality of this product, please install a filter,
air dryer, and oil mist filter on the inlet (upstream) side of this product.
When using this product for adsorption confirmation, be sure to install an air filter between the adsorption nozzle and this product to prevent the intake of contaminants.

Compact flow sensor Rapiflow FSM series product specification related image 2

Note 2: The analog output indicates 3 V when the flow rate is 0. When the lead is on the right side and you view the main body with the fluid flowing to the right, the output shifts toward 5 V. In the case of reverse flow, the output shifts toward 1 V.
Note 3: The switch output uses a single threshold detection method with fixed hysteresis, and can be set across the entire flow rate range by turning the trimmer. Additionally, the operating modes of OUT1 and OUT2 are opposite.
　　
Accuracy conditions: Temperature 25+/-3°C, supply voltage DC24+/-0.01 V
In this specification, F.S. (Full Scale) indicates the flow rate range. For example, if the flow rate range is -10 to +10 L/min, the F.S. is 20 L/min.
Note 5: The response time varies depending on the piping conditions.
Note 6: Please use clean, dry gas that does not contain corrosive components such as chlorine, sulfur, or acids, and is free of dust and oil.
When using compressed air, please use clean air of class 1.1.1 to 1.6.2 according to JIS B 8392-1:2003. Compressed air from the compressor contains condensate (water, oxidized oil, contaminants, etc.).
To maintain the function of this product, please install a filter, air dryer (min. pressure dew point 10°C or lower), and oil mist filter (maximum oil content 0.1 mg/m³) on the inlet (upstream) side of this product before use.
When using this product for adsorption verification, be sure to install an air filter between the adsorption nozzle and this product to prevent the intake of contaminants.
Note 7: Converted to volumetric flow rate at 20°C and 1 atmosphere (101 kPa).

FSM-V Series Separate Display Specifications (Dedicated for Analog Output Type) (Note 8)

Part number		Remote Indicator
Items		FSM-V-DN/P-R0005	FSM-V-DN/P-R0010	FSM-V-DN/P-R0050	FSM-V-DN/P-R0100	FSM-V-DN/P-R0500	FSM-V-DN/P-R1000
Compatible analog output type part numbers		FSM-V-A-R0005	FSM-V-A-R0010	FSM-V-A-R0050	FSM-V-A-R0100	FSM-V-A-R0500	FSM-V-A-R1000
Display	Type of Display	Flow rate display (3-digit 7-segment, orange), operation and switch output display (orange)
Display	Minimum Display Unit (Note 9)	0.1 mL/min (Note 7)	1 mL/min (Note 7)		0.01 L/min (Note 7)		0.1 L/min (Note 7)
Output		2-point switch output (NPN or PNP open collector output, 30 V DC, 50 mA max, voltage drop 2.4 V, compatible with PLC and relays) 1-point analog output (1–5 V voltage output, load impedance 50 kΩ or more)
Power supply voltage		DC12/24 V (10.8 to 26.4 V)
Current Consumption		50 mA or less (indicator only)
Lead		⌀3.7, 5-core (0.2 mm² insulator outer diameter ⌀1.0) 1 m
Available Functions		Flow rate display, flow rate peak hold, switch output, analog output
Operating ambient temperature, humidity		0 to +50°C, 85% RH or less (No condensation)
Protective Structure		IEC standard IP40
EMC Directive		EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8
Weight (g)		Approx. 70 (including 1 m lead)

Note 7: Converted to volumetric flow rate at 20°C and 1 atmosphere (101 kPa).
Note 8: The separate display unit is dedicated for analog output type. Please note that the switch output type cannot be connected.
Note 9: This indicates the minimum display unit of the flow rate and does not guarantee display accuracy.

: 30; 45; 60

Part Number
FSM-V-NH3-R0005-HL4

Part Number	Standard Unit Price	Minimum order quantity	Volume Discount	Days to Ship	Type	Flow Rate Range (Max. Value) (L/min)	Output Method	Analog Output Specification	Pipe Port Type	Plumbing Thread Type	Plumbing Thread Nominal	Pressure Type	Number of Input Points	Number of Output Points	Analog Voltage Output (V)	Power Supply Voltage (V)	Connecting Tube Diameter	Direct Connection Diameter	Flow Direction	Body Material	Connection equipment	Fitting type	Cable	Lead Wire Drawer Direction
	MYR 1,194.25	1 Piece(s)	Available	22 Day(s) or more	Flow rate sensor	[< 10] 0.05	NPN Open Collector	-	One-Touch Couplings	-	-	-	1	2	-	12~24	4	-	Bidirectional	Resin	-	L-shaped ⌀4 one-touch	With lead (3 m)	Straight type

Product TOP

Basic Information

Fluid Type	Air / Nitrogen Gas	Sensor, Monitor Structure	Separate Type, Connector Joint	Pressure Resistant(MPa)	0.3
Flow Rate Type	Small Flow Rate	Operating Temperature Range(°C)	0::50	Power Supply Type	DC

Please check the type/dimensions/specifications of the part FSM-V-NH3-R0005-HL4 in the Compact Flow Sensor Rapiflow FSM Series series.

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Specification/Dimensions

Analog Output Specification
- Voltage
Clear
Plumbing Thread Type
- M
Clear
Plumbing Thread Nominal
- 5
Clear
Pressure Type
- Standard
Clear
Analog Voltage Output(V)
- DC1-5V
Clear
Connection equipment
- 0.5
- 1
- 5
- 10
Clear
type
- FSM-V
- FSM-V-NH
- FSM-V-NV
- FSM-V-PH
- FSM-X
- FSM-X-AF
- FSM-X-AR
Clear
Type
- Pressure Sensor Head
- Flow rate sensor
- Flow monitor
Clear
Flow Rate Range (Max. Value)(L/min)
- < 10
  - 0.05
  - 0.1
  - 0.5
  - 1
  - 5
- 10 < 50
  - 10
Clear
Output Method
- NPN Open Collector
- PNP Open Collector
- Analog
Clear
Pipe Port Type
- Female Thread
- One-Touch Couplings
- Direct Attached
Clear
Number of Input Points
- 1
Clear
Number of Output Points
- 1
- 2
- 3
Clear
Power Supply Voltage(V)
- 12~24
Clear
Connecting Tube Diameter
- 4
Clear
Flow Direction
- From Left to Right Direction
- Bidirectional
Clear
Body Material
- Resin
Clear
Fitting type
- Straight type ⌀1.8 Air Fiber
- L-shaped ⌀4 one-touch
- Straight type ⌀4 one-touch
- With channel block (φ4mm one-touch fitting)
- Port diameter M5
- With channel block (M5)
- Sensor head individual
Clear
Cable
- With lead (3 m)
- With connector (3-core, 3m)
- NA
- Not Included
Clear
Lead Wire Drawer Direction
- L type
- Straight type
Clear
CAD
- 2D
- 3D
Clear

Days to Ship

All

11 Day(s) or Less

14 Day(s) or Less

22 Day(s) or Less

57 Day(s) or Less
Clear

Specify Alterations

The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .

Products like this...

Part Number
FSM-V-AH3-R0100-H2
FSM-V-AH3-R0100-HL4
FSM-V-AH3-R1000-HL4
FSM-V-NH3-R0005-M5
FSM-V-NH3-R0010-H2
FSM-V-NH3-R0010-H4

Standard Unit Price	Minimum order quantity	Volume Discount	Days to Ship	Type	Flow Rate Range (Max. Value) (L/min)	Output Method	Analog Output Specification	Pipe Port Type	Plumbing Thread Type	Plumbing Thread Nominal	Pressure Type	Number of Input Points	Number of Output Points	Analog Voltage Output (V)	Power Supply Voltage (V)	Connecting Tube Diameter	Direct Connection Diameter	Flow Direction	Body Material	Connection equipment	Fitting type	Cable	Lead Wire Drawer Direction
MYR 1,140.22	1 Piece(s)	Available	22 Day(s) or more	Flow rate sensor	[< 10] 1	Analog	-	Direct Attached	-	-	-	1	1	-	12~24	-	1.8	Bidirectional	Resin	-	Straight type ⌀1.8 Air Fiber	With lead (3 m)	Straight type
MYR 1,114.66	1 Piece(s)	Available	22 Day(s) or more	Flow rate sensor	[< 10] 1	Analog	-	One-Touch Couplings	-	-	-	1	1	-	12~24	4	-	Bidirectional	Resin	-	L-shaped ⌀4 one-touch	With lead (3 m)	Straight type
MYR 1,114.66	1 Piece(s)	Available	22 Day(s) or more	Flow rate sensor	[10 < 50] 10	Analog	-	One-Touch Couplings	-	-	-	1	1	-	12~24	4	-	Bidirectional	Resin	-	L-shaped ⌀4 one-touch	With lead (3 m)	Straight type
MYR 1,194.25	1 Piece(s)	Available	22 Day(s) or more	Flow rate sensor	[< 10] 0.05	NPN Open Collector	-	Female Thread	M	5	-	1	2	-	12~24	-	-	Bidirectional	Resin	-	Port diameter M5	With lead (3 m)	Straight type
MYR 1,219.81	1 Piece(s)	Available	22 Day(s) or more	Flow rate sensor	[< 10] 0.1	NPN Open Collector	-	Direct Attached	-	-	-	1	2	-	12~24	-	1.8	Bidirectional	Resin	-	Straight type ⌀1.8 Air Fiber	With lead (3 m)	Straight type
MYR 1,194.25	1 Piece(s)	Available	22 Day(s) or more	Flow rate sensor	[< 10] 0.1	NPN Open Collector	-	One-Touch Couplings	-	-	-	1	2	-	12~24	4	-	Bidirectional	Resin	-	Straight type ⌀4 one-touch	With lead (3 m)	Straight type

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Compact Flow Sensor Rapiflow FSM Series (FSM-V-NH3-R0005-HL4)

Drawing

FSM-X Series

FSM-V Series (Common to analog output type and switch output type)

Product Specification

FSM-X Series Specifications

FSM-V Series sensor main body specifications

FSM-V Series Separate Display Specifications (Dedicated for Analog Output Type) (Note 8)

Basic Information

Configure

Specification/Dimensions

Analog Output Specification

Plumbing Thread Type

Plumbing Thread Nominal

Pressure Type

Analog Voltage Output(V)

Connection equipment

type

Type

Flow Rate Range (Max. Value)(L/min)

Output Method

Pipe Port Type

Number of Input Points

Number of Output Points

Power Supply Voltage(V)

Connecting Tube Diameter

Flow Direction

Body Material

Fitting type

Cable

Lead Wire Drawer Direction

CAD

Days to Ship

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