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300 mm Wafer Compatible, Parallel Seal Type Slit Valve XGTP Series (XGTP300-20AS)
Parallel seal type slit valve XGTP series.
[Features]
・ Long lifespan: 3 million uses (At normal temperature)
・ Dust generation amount: Reduced to 1/5 or less
・ 22% reduction in air consumption
・ Easy bellows replacement
・ The gate can be replaced from the top
・ Mechanical end lock mechanism adopted
(i)Caution
- Refer to the manufacturer's catalog for specification and material details.
- The product images are representative only. Please refer to the manufacturer's catalog for shape details.
Part Number
Configured Part Number is shown.
XGTP300-20AS
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Product Details - CAD Data unavailable
Specification/Dimensions
-
Size
- Height 50 × width 366 mm (Open window)
-
Connector type
- D-sub connector
- Multi connector (AMP)
- None
-
Specifications
- Long lifespan of 3 million uses (At normal temperature)
-
Valve Model
- Cassette type (Half-MESK body)
- Cassette type (Standard body)
- Insert type (Without body)
-
Auto switch
- D-A93
- None
-
End Lock
- None
- OPEN/CLOSE end lock
-
type
- XGT300
- XGTP300
- XGTP311
- XGTP312
- XGTP313
-
Types of Related components
- Bellows
- Fixing bolt
- Gate
- O-ring (Body opening surface)
- O-ring (Bonnet assembly)
- O-ring (Gate part)
- Slit valve
-
Material
- SUS316
- AM350
- Kalrez 4079
- Kalrez 4079 (Gate part seal)
- A6063
- FKM
- FKM (Gate part seal)
Days to Ship
-
- All
- 27 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
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