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Air Operated Valve for Process Gas, AGD*1R/AGD*2R series (Part Numbers)
- Volume Discount
Air Operated Valve for Process Gas.
[Features]
· This is a core product of process gas valves featuring a metal diaphragm.
· Equipment for chemical gas supply systems, chemical liquid supply systems, semiconductor manufacturing processes, and N2 purge-related equipment
(i)Caution
- The product images are representative only. Specifications may vary by part number, including shape and color.
Japanese Only
Part Number
Configured Part Number is shown.
Drawing
AGD0*R-4RM
AGD0*R-4R
AGD1*R-4RM/AGD2*R-6RM
AGD1*R-4R/AGD2*R-6R
AGD1*R-4S/AGD2*R-6S
Product Specification
AGD01R/AGD02R
| Items | AGD01R | AGD02R |
|---|---|---|
| Operating fluid | inert gas / process gas | |
| Operating pressure Pa (abs) - MPa (G) | 1.3 x 10-6 to 0.99 | |
| Fluid temperature°C | 5 to 80 | |
| Operating ambient temperature°C | 5 to 80 | |
| Storage ambient temperature°C | -10 to 80 | |
| Valve seat leakage Pa·m3/s (He) | 1.0 x 10-10 or less | |
| External leakage Pa·m3/s (He) | 2.8 x 10-12 or less | |
| Cv value (23°C, pressurized) | 0.1 | |
| Connection method | 1/4" JXR male fitting 1/4" JXR female fitting | |
| Operation method | NC type (normally closed) | NO type (normally open) |
| Operating pressure (MPa) | 0.4 to 0.6 | 0.4 to 0.5 |
| Operating port | M5 | |
| Weight kg | 0.15 *1 | |
*1: Value for AGD01R-4RM (1/4" JXR male fitting).
AGD1*R/AGD2*R
| Items | AGD1*R | AGD2*R |
|---|---|---|
| Operating fluid | inert gas / process gas | |
| Operating pressure Pa (abs) - MPa (G) | 1.3 x 10-6 to 0.99 | |
| Fluid temperature°C | 5 to 80 | |
| Operating ambient temperature°C | 5 to 80 | |
| Storage ambient temperature°C | -10 to 80 | |
| Valve seat leakage Pa·m3/s (He) | 1.0 x 10-10 or less | |
| External leakage Pa·m3/s (He) | 2.8 x 10-12 or less | |
| Cv value (23°C, pressurized) | 0.3 | 0.65 |
| Connection method | 1/4" JXR male fitting 1/4" JXR female fitting 1/4" double compression fitting | 3/8" JXR male fitting 3/8" JXR female fitting 3/8" double compression fitting |
| Operation method | NC type (normally closed) NO type (normally open) | NC type (normally closed) NO type (normally open) |
| Operating pressure (MPa) | NC: 0.4 to 0.6 NO: 0.4 to 0.5 | NC: 0.4 to 0.6 NO: 0.4 to 0.5 |
| Operating port | M5 | |
| Weight kg | 0.26 Note 1 | 0.59 Note 1 |
Note 1: Value for AGD11R-4RM (1/4" JXR male fitting) and AGD21R-6RM (3/8" JXR male fitting).
Material used for gas-contacting parts
| Product number | Part name | Material |
|---|---|---|
| (1) | Diaphragm | Ni-Co alloy |
| (2) | Valve sheet | PCTFE |
| (3) | Body | SUS316L |
| Product number | Part name | Material |
|---|---|---|
| (1) | Diaphragm | Ni-Co alloy |
| (2) | Valve sheet | PCTFE |
| (3) | Body | SUS316L |
Specifications Table
AGD0*R-4RM
AGD0*R-4R
AGD1*R-4RM/AGD2*R-6RM
AGD1*R-4R/AGD2*R-6R
AGD1*R-4S/AGD2*R-6S
Product Feature Details
AGD01R/AGD02R
*1: JXR fittings can be connected to VCR fittings.
*2: The lifespan applies when the fluid used is an inert gas within the specified range and does not contain solid substances such as reaction byproducts.
AGD1*R/AGD2*R
*1: JXR fittings can be connected to VCR fittings.
*2: The lifespan applies when the fluid used is an inert gas within the specified range and does not contain solid substances such as reaction byproducts.
| Part Number |
|---|
| AGD01R-4R |
| AGD01R-4RM |
| AGD02R-4R |
| AGD11R-4R |
| AGD11R-4RM |
| AGD11R-4S |
| AGD12R-4R |
| AGD12R-4S |
| AGD21R-6R |
| AGD21R-6RM |
| AGD21R-6S |
| AGD22R-6R |
| AGD22R-6RM |
| AGD22R-6S |
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Plumbing Thread Nominal | Operating Environment | Switching Type | Connection Type Details | Cv Value (23°C, Under Pressure) |
|---|---|---|---|---|---|---|---|---|---|
MYR 1,691.67 | 1 Piece(s) | Available | 13 Day(s) or more | 1/4 | Highly corrosion resistant | [Normally Closed] Normally Closed | JXR female fitting | 0.1 | |
MYR 1,353.42 | 1 Piece(s) | Available | 33 Day(s) or more | 1/4 | Highly corrosion resistant | [Normally Closed] Normally Closed | JXR male fitting | 0.1 | |
MYR 1,691.62 | 1 Piece(s) | Available | 13 Day(s) or more | 1/4 | Highly corrosion resistant | [Normally Open] Normally Open | JXR female fitting | 0.1 | |
MYR 2,009.60 | 1 Piece(s) | 8 Day(s) or more | - | - | - | - | - | ||
MYR 1,616.20 | 1 Piece(s) | Available | 82 Day(s) or more | - | - | - | - | - | |
MYR 1,694.88 | 1 Piece(s) | Available | 65 Day(s) or more | 1/4 | Standard | [Normally Closed] 2-Port Normally Closed | Double bite type fitting | - | |
MYR 1,879.84 | 1 Piece(s) | Available | 13 Day(s) or more | 1/4 | Highly corrosion resistant | [Normally Open] Normally Open | JXR female fitting | 0.3 | |
MYR 1,624.18 | 1 Piece(s) | Available | 13 Day(s) or more | 1/4 | Highly corrosion resistant | [Normally Open] Normally Open | Double bite type fitting | 0.3 | |
MYR 2,560.36 | 1 Piece(s) | Available | 8 Day(s) or more | - | - | - | - | - | |
MYR 2,245.64 | 1 Piece(s) | 77 Day(s) or more | - | - | - | - | - | ||
MYR 2,505.29 | 1 Piece(s) | Available | 15 Day(s) or more | 3/8 | Standard | [Normally Closed] 2-Port Normally Closed | Double bite type fitting | - | |
MYR 2,327.27 | 1 Piece(s) | Available | 13 Day(s) or more | 3/8 | Highly corrosion resistant | [Normally Open] Normally Open | JXR female fitting | 0.65 | |
MYR 1,973.46 | 1 Piece(s) | Available | 26 Day(s) or more | 3/8 | Highly corrosion resistant | [Normally Open] Normally Open | JXR male fitting | 0.65 | |
MYR 2,205.94 | 1 Piece(s) | Available | 13 Day(s) or more | 3/8 | Highly corrosion resistant | [Normally Open] Normally Open | Double bite type fitting | 0.65 |
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Basic Information
| Applicable Fluid | Gas | Type | Air Operated Type | Connection Type | Others |
|---|
Specification/Dimensions
-
Plumbing Thread Nominal
-
Operating Environment
- Standard
- Highly corrosion resistant
-
Switching Type
- Normally Closed
- Normally Open
- Normally Closed
-
Connection Type Details
- Double bite type fitting
- JXR female fitting
- JXR male fitting
-
Cv Value (23°C, Under Pressure)
- 0.1
- 0.3
- 0.65
-
type
- AGD01R
- AGD02R
- AGD11R
- AGD12R
- AGD21R
- AGD22R
-
CAD
- 2D
- 3D
Days to Ship
-
- All
- 8 Day(s) or Less
- 13 Day(s) or Less
- 15 Day(s) or Less
- 26 Day(s) or Less
- 33 Day(s) or Less
- 65 Day(s) or Less
- 77 Day(s) or Less
- 82 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
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